System level modeling of mems by chongboudreau issuu. Systemlevel modeling of mems microelectromechanical systems comprises integrated approaches to simulate, understand, and optimize the performance of sensors, actuators, and microsystems, taking into account the intricacies of the interplay between mechanical and electrical properties, circuitry, packaging, and design considerations. Users may download and print one copy of any publication from the public portal for the. Lowvolume custom mems design methodology characteristics support wide variety of mems fab processes supporting a wide class of mems designs extensible to new mems design concepts fits into the existing vlsi design flows capable of evaluating integrated system designs. An introduction to mems microelectromechanical systems. Abstract in this paper mems models for different abstraction levels from device level till system level are considered. Systemlevel modeling of mems microelectromechanical systems comprises integrated approaches to. Systemlevel modeling and design of integrated mems materials. Abstract the paper is focused on system level modeling of mems using advanced reduced order modeling rom methods based on mode superposition technique and finite element solvers for data extraction. Systemlevel modeling of mems microelectromechanical systems comprises integrated. System level modeling of mems at tu chemnitz memsdesign group.